Catalyst Surface Reference Etching Method CARE
Flattening various materials at the atomic scale through pads with catalytic functions.
A unique etching technology that utilizes catalytic action to chemically remove only the protrusions on the processed surface by moving ultra-pure water as the processing fluid over a substrate with pads that have catalytic functions (such as films of Pt or Ni). It flattens the surfaces of various materials, including glass and SiC, at the atomic scale. CARE further achieves a P-V of 0.7 nm and aims to become the ultimate processing method capable of achieving flatness at the level of a single atom in the future.
- Company：ジェイテックコーポレーション
- Price：Other
